Automated Metrology System

EV Group (EVG)Request Info
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Automated Metrology SystemThe EVG®40 NT2 automated metrology system from EV Group provides overlay and critical dimension measurements for wafer-to-wafer, die-to-wafer, and die-to-die bonding, as well as maskless lithography applications.

Designed for high-volume production with feedback loops for real-time process correction and optimization, the EVG40 NT2 helps device manufacturers, foundries, and packaging houses accelerate the introduction of 3D, heterogeneous integration products while improving yields and avoiding the scrapping of highly valuable wafers.

Published: December 2021
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ProductsEVG40 NT2automated metrology systemEV GroupTest & MeasurementWafersnanosemiconductorsEurope

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