Automated Metrology System
EV Group (EVG)Request Info
The EVG®40 NT2 automated metrology system from EV Group provides overlay and critical dimension measurements for wafer-to-wafer, die-to-wafer, and die-to-die bonding, as well as maskless lithography applications.
Designed for high-volume production with feedback loops for real-time process correction and optimization, the EVG40 NT2 helps device manufacturers, foundries, and packaging houses accelerate the introduction of 3D, heterogeneous integration products while improving yields and avoiding the scrapping of highly valuable wafers.
https://www.evgroup.com
https://www.photonics.com/Buyers_Guide/EV_Group_EVG/c4622
Photonics Spectra
Feb 2022