Automated Resist Processing System

EV Group (EVG)Request Info
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Automated Resist Processing SystemThe 200-mm version of the EVG®150 automated resist processing system from the EV Group is an optical lithography platform that includes advanced features and enhancements that provide even greater throughput, versatility, and compactness compared to its previous generation.

The EVG150 provides reliable and high-quality coating and developing processes in a universal platform that supports a variety of devices and applications including advanced packaging, microelectromechanical systems, radio frequency, 3D sensing, power electronics, and photonics. It supports the demanding needs for both high-volume production and industrial development.

Published: November 2022
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ProductsEVG150automated resist processing systemOpticsMaterialssensors & electronicsindustrialEurope

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