Avia DUV Laser

Coherent Inc.Request Info
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The new Avia 266-3 from laser maker Coherent Inc. is a second-generation deep-ultraviolet (DUV) laser, combining high-power output with extended lifetime, output stability, and industrial-grade reliability needed for 24/7 industrial applications, the company said 

Coherent said the Avia 266-3 incorporates a number of innovations in both components and manufacturing methods, such as the lifetime of the consumable crystal being increased by 25 percent to 40,000 hours.

CoherentAvia266-3.jpgThe Avia 266-3 provides over 3 W of Q-switched output at 266 nm, and pulse repetition rates as high as 100 kHz, with superior beam quality and high pulse-to-pulse stability. It is fully RoHS compliant and backed by a 24-month warranty, which is at least twice as long as those offered by any other laser in its class, Coherent said.

The combination of DUV wavelength, high average power, long lifetime and low cost of ownership makes the Avia 266-3 an ideal laser for micromachining applications for a wide range of materials used in microelectronics and other industries, according to the company. And the use of automated systems such as the Posilock beam-pointing active stabilization system delivers the maximum possible spatial control and resolution in these applications; the laser is especially suited for drilling microvias and micromachining structures in glass substrates.

Other applications include micromachining synthetic materials such as FR4 and acrylic, drilling small diameter nozzles and orifices, marking glass and plastics such as polycarbonate, and micromachining and drilling tougher materials such as steel, tungsten and aluminum nitride.

For more information, visit:; e-mail: [email protected]

Coherent Inc.
5100 Patrick Henry Dr.
Santa Clara, CA 95054
Phone: (408) 764-4000
Fax: (408) 764-4800

Published: May 2007
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Avia 266-3CoherentCoherent Inc.industrialmicroelectronicsmicromachiningnanophotonicsPosiLockProductsQ-switchedUVLasers

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