Ceramic Motor Stage

Heason Technology Ltd.

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SLINFOLD, England, Aug. 2, 2011 — Nanomotion has added a Z-wedge vertical stage to its FB range of compact nanometer-level micropositioning mechanics. Available in the UK through Heason Technology Ltd., the stages complement a modular and compact range of linear, rotary and goniometric stages that together provide multiaxis and nanometer-level translation in all six degrees of freedom.

The FBZ075-10 has a classic upper and lower wedge design featuring a precision-grade cross roller bearing arrangement that maintains stage stiffness, with a side-mounted ceramic motor driving the bottom wedge via a ceramic strip. A linear encoder, available with optional resolution from 5 to 100 nm, is mounted directly onto the vertical translation element to eliminate potential wedge angle errors.

The moving top plate provides full and easy access from all sides and measures 75 × 75 mm, with a maximum height of 48 mm. The compact FBZ stage has a vertical travel range of 10 mm and a load-carrying capacity of 2 kg.

The FB range uses Nanomotion’s HR series high-force ceramic motors, providing a wide dynamic speed range from a few microns per second up to 250 mm/s, with high acceleration. Aimed at demanding ultrahigh precision applications such as semiconductor, biomedical and optomechanical systems, the technology has no intrinsic magnetic field or moving parts and is well suited to ultraclean and vacuum environments.

Ceramic motor technology has built-in braking and holding capability and combines high-stiffness motion control with fast settling times and optimum in-position stability.

FB series linear positioning stages are available in travel ranges from 20 to 300 mm with direct loads to 3.75 kg. With goniometric-style rotary stages available as well as full rotary models, users can arrange multiaxis positioning mechanics around a central pivot axis with angular resolution down to a few arcsec.

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Published: August 2011