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Chiller/Heater Technology

Photonics Spectra
Dec 2013
Durex IndustriesRequest Info
Durex Industries has announced its patent-pending extreme ceramic chiller/heater for semiconductor equipment and analytical instrumentation applications.

The aluminum nitride chiller-technology-based ceramic heater has an embedded tungsten resistance temperature detector (RTD). It can heat from 100 to 450 °C at 200 °C/s and can cool from 450 to 100 °C at 100 °C/s.

Its performance is based on proprietary multilayer monolithic ceramic technology. The high thermal conductivity and low temperature expansion properties of aluminum nitride enable the fast temperature response.

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Americasanalytical instrumentationchiller/heater technologyDurex IndustriesIllinoisimagingNew ProductsProductssemiconductor equipmentTest & Measurement

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