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Thin-Film Deposition System

EuroPhotonics
Mar 2014
Picodeon Ltd. OyRequest Info
 
The ColdAb Series 4 thin-film deposition system from Picodeon Ltd. Oy is designed for pulsed laser deposition (PLD) of oxides, metals and several composites in volume manufacturing.

The system delivers industrial-scale PLD coating production of 4-in. wafers, including the delivery of substrates to the preclean chamber and the main coating chamber. The process uses a 200-W high-frequency picosecond laser at 40 MHz to enable multilayer deposition and coating of temperature-sensitive polymers.


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