Compact Nanopositioning Stage

PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo MechanicsRequest Info
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AUBURN, Mass., June 24, 2024 — PI Compact Nanopositioning StageThe P-616 from PI is an XYZ piezo nanopositioning stage based on a parallel-kinetic design for applications such as fiber optics alignment, microscopy, 3D imaging, and semiconductor metrology, among others. Compact and flexure-guided, the stage comes with integrated capacitive sensors for measuring motion directly and contact-free at the moving platform. The P-616 features a 100-µm linear travel range in three degrees of freedom, digital servo piezo controller programming, PI’s PIMikroMove software for accessing motion parameters and settings, and ceramic-encapsulated flexure motion-amplified piezo actuators.

Published: June 2024
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Productsnanopositioning equipmentmaterials processingTest & MeasurementpiezometrologyWafersMicroscopy3D imagingsemiconductorsfiber opticsSoftwareindustrialAmericasPI

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