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Confocal Height Sensor

MKS/NewportRequest Info
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Newport Corp. has announced the availability of a chromatic confocal height sensor for use with its MRSI dispense systems. The sensor allows measurement on a single axis, providing access to deep cavities, confined spaces and areas that are close to walls and other obstructions. This tool is suitable for radio-frequency and microwave packages, where measurement using traditional reflective laser height-sensing techniques is difficult. An LED light source with a sensor spot size of 50 μm in diameter provides nanoresolution that is nearly target-independent. The device allows accurate measurement of glass, semiconductor materials and mirrored surfaces.

Photonics Spectra
Dec 2010

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chromatic confocal height sensordeep cavityglass measurementimagingLight Emitting Diodelight sourcesmicrowave packagemirrored surfaceMRSI dispense systemNew ProductsNewportNewport Corporationradio frequencysemiconductor materialssensorsensor spot sizeSensors & Detectorssingle axisLEDs

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