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Confocal Height Sensor

MKS/NewportRequest Info
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IRVINE, Calif., Oct. 12, 2010 — Newport Corp. has announced that a confocal height sensor is now available for use with its MRSI dispense systems. The chromatic confocal sensor allows measurements in a single axis, providing access to deep cavities, confined spaces and areas that are close to walls and other obstructions.

This measuring tool is suitable for radio-frequency and microwave packages, which have been difficult to measure using traditional, reflective-laser height-sensing techniques.

An LED light source with a sensor spot size of 50 µm in diameter provides nanoresolution that is nearly target independent. The confocal sensor allows accurate measurement of glass, semiconductor materials and mirrored surfaces. It can be used to precisely determine dispense heights for three of the company’s legacy products, the MRSI-175Ag, the MRSI-605 and the MRSI M-5.

The MRSI dispense systems provide advanced assembly solutions for complete epoxy die attach, eutectic, and flip-chip bonding and packaging, delivering turnkey production for microelectromechanical systems, multichip modules, semiconductor packaging, microwave modules and photonics packaging.
Oct 2010

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