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Confocal Metrology Systems

Photonics.com
May 2009
Veeco Instruments Inc.Request Info
 
Optical profiling systems
PLAINVIEW, N.Y., May 28, 2009 – Veeco Instruments Inc. has launched the Veeco Confocal Metrology (VCM) optical profiler systems that are compact and easy-to-use noncontact solutions for characterization of steep slopes greater than 60°, measurement of layers beneath transmissive surfaces or analysis of samples made up of dissimilar materials. Based on spinning disc architecture, they employ white light as the excitation source, enabling fast, accurate and repeatable 3-D measurements.

Veeco_optical-profiler.jpgThe confocal microscopes allow for 150, 200, or 300 mm of travel and can be configured for either manual or automated operation. The software features a full complement of metrology and 3-D imaging tools and accommodates advanced research, development and industrial needs, from economical manual operation to high-throughput, fully automated sample positioning and data acquisition. An optional stitching interface facilitates stitching of multiple data sets, providing high-resolution imaging of features requiring a larger field of view.

The systems characterize samples at submicrometer lateral and nanometer vertical resolution. The metallurgical microscope platform provides intuitive operation and enables complementary bright-field, dark-field and differential interference contrast techniques for hybrid metrology.

Applications include microlenses, materials and metallography, medical implants, microfluidics, chip packaging, paper and printing, and precision machining.

For more information, visit: www.veeco.com  

Veeco Instruments Inc.
Terminal Drive
Plainview, N.Y. 11803
Phone: (516) 677-0200
Fax: (516) 714-1200


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