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Latest News Latest Products Features All Things Photonics Podcast Photonics Spectra Now

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Direct-Drive Rotary Stages

Aerotech Inc.Request Info

Aerotech’s ANT95-R and ANT130-R series direct-drive rotary stages feature 0.005-arcsec in-position stability and 0.01-arcsec resolution. They are designed for compatibility and easy integration with ANT series linear stages and provide accuracy, stability, compact size and high dynamic performance required for nanomanufacturing and inspection applications.

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Published: November 2010

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