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Direct-Drive Rotary Stages

Aerotech Inc.Request Info
 
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Aerotech’s ANT95-R and ANT130-R series direct-drive rotary stages feature 0.005-arcsec in-position stability and 0.01-arcsec resolution. They are designed for compatibility and easy integration with ANT series linear stages and provide accuracy, stability, compact size and high dynamic performance required for nanomanufacturing and inspection applications.


Photonics Showcase
Jan 2011
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