Search Menu
Photonics Media Photonics Marketplace Photonics Spectra BioPhotonics EuroPhotonics Vision Spectra Photonics Showcase Photonics ProdSpec Photonics Handbook

DynamYX Datum 450 and 450GT

MKS/NewportRequest Info
Facebook Twitter LinkedIn Email Comments
IRVINE, Calif., July 10, 2012 — Newport Corp. has introduced a line of air-bearing stages designed for the 450-mm semiconductor wafer initiative.

The DynamYX Datum 450 and 450GT are based on the company’s DynamYX 300 series wafer processing and inspection platforms and are suited to handle the larger travel ranges, payloads and increased throughput requirements of next-generation 450-mm tools.

They deliver high-resolution dynamic positioning of a wafer chuck or similar substrate in two orthogonal translation axes from a single-plane carriage. For added flexibility, a vertical Z-axis with tip/tilt function and a rotary axis for wafer offset correction can be added on the carriage beneath the wafer chuck. Other options are available for encoder and interferometer feedback.

Linear motors minimize heat generation and apply drive forces through the center of gravity of the stage, resulting in long-term repeatability and dynamic performance. Maximum velocity reaches 1.5 m/s, with acceleration of 2 (Y axis) and 3 g (X axis). With a rated payload of 20 kg, the new 300-Hz natural frequency stages feature high accuracy (encoder feedback) at 50 nm (3 sigma) and high repeatability at 10 nm (3 sigma).

Highly differentiated and proprietary construction using advanced ceramics (SiC) yields lightweight and rigid structures with high natural frequencies and thermal stability. A low-profile monolithic stage architecture with integrated pressure-vacuum air bearings provides good stepping and scanning performance.
Jul 2012

* Message:
(requirements, questions for supplier)
Your contact information
* First Name:
* Last Name:
* Email Address:
* Company:
Address 2:
Postal Code:
* Country:
Phone #:
Fax #:

Register or login to auto-populate this form:
Login Register
* Required

When you click "Send Request", we will record and send your personal contact information to MKS/Newport by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our Privacy Policy and Terms and Conditions of Use.
Photonics Marketplace
Looking for Ceramics? There are 53 companies listed in the Photonics Buyers' Guide.
Browse Cameras & Imaging, Lasers, Optical Components, Test & Measurement, and more.
air-bearing stagesAmericasCaliforniaDynam YX Datum 450Dynam YX Datum 450 GTmonolithic stage architectureNewportpositioning wafer chuckProductsstages 450-mm semiconductor wafersstages linear motorsstages pressure-vacuum air bearingsstages rotary axisstages vertical Z-axisTest & Measurement

view all
back to top
Facebook Twitter Instagram LinkedIn YouTube RSS
©2021 Photonics Media, 100 West St., Pittsfield, MA, 01201 USA, [email protected]

Photonics Media, Laurin Publishing
x We deliver – right to your inbox. Subscribe FREE to our newsletters.
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.