Search Menu
Photonics Media Photonics Marketplace Photonics Spectra BioPhotonics Vision Spectra Photonics Showcase Photonics ProdSpec Photonics Handbook

EUV Spectrometer

McPHERSONRequest Info
Facebook Twitter LinkedIn Email
CHELMSFORD, Mass., Jan. 12, 2009 – McPherson Inc. has released an x-ray and extreme ultraviolet (EUV) spectrometer, the 251MX, for wavelength dispersive spectral measurements from 0.6 to 20 nm (60 to 2000 eV.) The device provides corrected flat-field spectra with its selection of diffraction gratings. Data is acquired quickly and easily with direct-detection CCDs. The clean stainless steel chamber and vacuum-prepared internal components enable efficient pumping for high- or ultrahigh-vacuum (UHV) applications.

McPherson.jpgThe small footprint simplifies systems integration. The two available gratings, for 0.6 to 6 nm and 5 to 20 nm have square groove profiles. The laminar design helps reduce effects of high diffracted orders, and the corrected grating designs deliver high-resolution spectra.

The spectrometer advances laboratory soft x-ray and EUV spectral characterization and enables simultaneous spectral detection over a wide range. The dedicated optical geometry reduces calibration errors and increases the amount of data that can be collected in a given amount of time.

The stand-alone spectrograph is vacuum leak-tested and certified, and it is supplied with measured optical performance data in the wavelength region of interest. The turnkey integrated system includes pumps and a detector.

Applications include soft x-ray plasma diagnostics, analysis of high-order harmonic generated coherent EUV lasers, characterization of EUV sources for high-resolution imaging and fabrication of advanced semiconductor lithography processes.

For more information, visit:

McPherson Inc.
7A Stuart Road
Chelmsford MA 01824-4107
Phone: (978) 256-4512 (or 1-800-255-1055)
Fax: 978-250-8625

Jan 2009
* First Name:
* Last Name:
* Email Address:
* Company:
* Country:

When you click "Send Request", we will record and send your personal contact information to McPHERSON by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our Privacy Policy and Terms and Conditions of Use.

Register or login to auto-populate this form:
Login Register
* Required

Photonics Marketplace
Looking for Pumps? There are 16 companies listed in the Photonics Buyers' Guide.
Browse Cameras & Imaging, Lasers, Optical Components, Test & Measurement, and more.
Biophotonicsdirect-detection CCDsEUVextreme ultraviolet spectrometerflat-field spectrahigh-order harmonic generated coherent EUV lasershigh-resolution imagingindustriallaminar designMcPherson Inc.optical geometryphotonicsProductssemiconductor lithographySensors & DetectorsSpectrometerspectroscopyultrahigh-vacuum applicationsx-rayx-ray plasma diagnostics

back to top
Facebook Twitter Instagram LinkedIn YouTube RSS
©2023 Photonics Media, 100 West St., Pittsfield, MA, 01201 USA, [email protected]

Photonics Media, Laurin Publishing
x We deliver – right to your inbox. Subscribe FREE to our newsletters.
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.