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Coherent.jpgCoherent Inc.’s IndyStar is a compact industrial excimer laser that offers a long tube life and incorporates the proprietary RoHS-Almeta design, delivering several billion pulses at 193 and 248 nm. The ArF laser produces stabilized energies of 8 mJ per pulse at 193 nm and 12 mJ at 248 nm, with repetition rates of up to 1 kHz and a beam cross section of 6 × 3 mm. Designed as a replacement for the ExciStar S-Industrial excimer laser, the new model’s dimensions, power connections, computer interfaces and performance parameters are identical.

Photonics Spectra
Aug 2008

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