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Electrodeless EUV Light Source

Energetiq Technology Inc.Request Info
 
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WILMINGTON, Mass., Oct. 4, 2024 — Energetiq Technology Electrodeless EUV Light SourceThe EQS-10 from Energetiq Technology is an electrodeless Z-Pinch EUV light source for EUV applications, including EUV metrology, resist development, and defect inspection. Designed with solid-state switching technology, the light source delivers up to four times the energy per pulse with an operating frequency of up to 5 kHz. The EQS-10 also features the company’s direct fueling system, which can reduce gas consumption by up to 60%.



Published: October 2024
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Productsextreme ultraviolet light sourcesultraviolet light sourcesLight SourcesEUVZ-pinchinspectionmetrologyEUV metrologyTest & MeasurementAmericasEnergetiq Technology

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