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Excimer Laser

Coherent Inc.Request Info
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Coherent Inc. has added a new model to its Indy-Star family of compact excimer lasers that offers a 2-kHz repetition rate for increased throughput. The fully Semi S2-certified laser incorporates several new output stabilization features for improved processing, making it suitable for use in semiconductor fabrication, testing, inspection and micromaterials processing facilities. It is offered with a choice of 193-nm (ArF) output, where it delivers 8 W of stabilized power, or with 248-nm (KrF) output with 12 W of stabilized power. Suitable for use in semiconductor applications such as photomask inspection and testing photolithography optics, it enables other high-speed processes also, including precision material ablation tasks and high-value marking applications.

Photonics Spectra
Jul 2010

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ArFCoherent Inc.excimer laserindustrialIndyStarinspectionmarkingmaterial ablationMicromaterialsmicromaterials processingNew Productsopticsoutputoutput stabilizationphotolithographyphotolithography opticsphotomask inspectionpowerSemi S2 certificationsemiconductor fabricationsemiconductorsstabilizationTest & Measurementlasers

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