Close

Search

Search Menu
Photonics Media Photonics Buyers' Guide Photonics Spectra BioPhotonics EuroPhotonics Vision Spectra Photonics Showcase Photonics ProdSpec Photonics Handbook
More News

FERA3 XMH Scanning Electron Microscope

Tescan Brno s.r.o.Request Info
 
Facebook Twitter LinkedIn Email Comments
BRNO, Czech Republic, Dec. 13, 2011 — Tescan has unveiled the FERA3 XMH high-resolution Schottky field emission scanning electron microscope with an integrated plasma source focused ion beam (FIB). The system has been developed in cooperation with French company Orsay Physics.

In addition to electron and ion columns, the microscope can be configured with gas injection systems, nanomanipulators, secondary electron detectors, backscatter detectors, secondary ion detectors, cathodoluminescence detectors, and energy-dispersive and electron backscatter diffraction microanalyzers.

The use of a xenon plasma source for the focused ion beam allows the FERA3 to satisfy high-resolution focused ion beam requirements (imaging, fine milling/polishing) as well as to produce the high ion currents needed for ultrafast material removal rates. The resolution of the plasma ion beam is <100 nm, and the maximum xenon ion current is >1 µA.

The company says that, compared to existing FIB technologies with gallium sources, the material removal rate achievable for silicon with the plasma FIB is more than 30 times faster. This speed renders the FERA3 XMH well suited for applications requiring the removal of large volumes of material, particularly in semiconductor packaging where through-silicon via technology is used.

Applications include inspection of integrated circuit packaging, circuit edit, 3-D metrology, defect analysis and failure analysis.   


Photonics.com
Dec 2011
REQUEST INFO ABOUT THIS PRODUCT

* Message:
(requirements, questions for supplier)
Your contact information
* First Name:
* Last Name:
* Email Address:
* Company:
Address:
Address 2:
City:
State/Province:
Postal Code:
* Country:
Phone #:
Fax #:

Register or login to auto-populate this form:
Login Register
* Required

When you click "Send Request", we will record and send your personal contact information to Tescan Brno s.r.o. by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our Privacy Policy and Terms and Conditions of Use.
metrologyBiophotonicsCzech RepublicEuropeFERA3 XMH scanning electron microscopeMicroscopyopticsProductsscanning electron microscope configured with secondary electron detectorsscanning electron microscope configured with secondary ion detectorsscanning electron microscope integrated plasma source focused ion beamscanning electron microscope semiconductor packagingSchottky field emission SEMSEM 3-D metrologySEM circuit editSEM configured with backscatter detectorsSEM configured with cathodoluminescence detectorsSEM configured with electron backscatter diffraction microanalyzersSEM configured with energy-dispersive microanalyzersSEM configured with gas injection systemsSEM configured with nanomanipulatorsSEM defect analysisSEM electron and ion columnsSEM failure analysisSEM inspection of IC packagingSEM removal of large volumes of materialSensors & DetectorsTescanTest & Measurement

back to top
Facebook Twitter Instagram LinkedIn YouTube RSS
©2019 Photonics Media, 100 West St., Pittsfield, MA, 01201 USA, info@photonics.com

Photonics Media, Laurin Publishing
x We deliver – right to your inbox. Subscribe FREE to our newsletters.
X
Are you interested in this product?
When you click "Send Request", we will send the contact details you supply to Tescan Brno s.r.o. so they may respond to your inquiry directly.

Email Address:
Name:
Company:
Stop showing me this for the remainder of my visit
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.