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FilmTek 4000 Robotic

Bruker Nano SurfacesRequest Info
 
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Bruker Nano, Inc. - FilmTek 4000 RoboticFilmTek 4000 is a fully automated, nondestructive optical property and thickness metrology tool specifically designed to address the demanding process control needs of silicon photonics, photonic integrated circuits, and planar waveguides. The system utilizes proprietary multi-angle reflectance technology, with beams specifically optimized for 50 nm to 150 μm films, to provide best-in-class index of refraction (n) resolution and repeatability. FilmTek 4000 uniquely enables precise real-time in-line monitoring of optical properties n and coefficient of extinction (k) — necessary when producing materials like BPSG, Ge-SiO2 , P-SiO2 , Si3N4 , SiON, and LiNbO3.

The FilmTek 4000 Robotic offers several unique capabilities and functionalities, including:
  • Ultimate Non-Contact Refractive Index Resolution
  • Enhanced Versatility for Single- and Multi-Layer Stacks
  • Fully Automated, High-Throughput In-Line Metrology



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Productsfilm thickness measurementmulti-angle reflectometryFilmTekmulti-stack filmssilicon photonicsreflectometryautomated equipmentfilm metrologynon-contact metrologyfilm measurementTest & Measurement

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