Fizeau Interferometer

Zygo CorporationRequest Info
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MIDDLEFIELD, Conn., June 26, 2015 — Zygo Verifire XLDesigned for measuring large plano surfaces such as mirrors, semiconductor wafers or optical windows, a new phase-shifting laser Fizeau interferometer from Zygo Corp. can characterize flat surfaces up to 12 in. (300 mm) in diameter.

Verifire XL is a turnkey system incorporating staging, accessories and production-oriented technology. It comes with an integrated vibration isolation platform and the company's QPSI vibration-robust acquisition technology.

It also features Mx metrology software, which includes the new Smart Averaging feature to automatically provide the best possible measurement in the shortest time.

Published: June 2015
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