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Galvanometer Drivers

SCANLAB GmbHRequest Info
 
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New galvanometer drivers from Scanlab AG have lower inertia for precision laser positioning.

The drives are equipped with lightweight beryllium mirrors and a 14-mm aperture. The positioning encoder uses a zero-mass laser beam to sense a stationary scale, eliminating inertia-increasing components.

The new technology is featured in Scanlab’s dynAXISse galvanometer scanner and intelliSCANse 2-D scan system. Applications include semiconductor lithography, microstructuring, and processing of electronics and displays.



Published: September 2014
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