Gapfill Material

Brewer Science Inc.Request Info
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The OptiStack® PL200 series material from Brewer Science Inc. is a silicon-rich high-aspect ratio gapfill material designed to solve problems in sacrificial gapfill applications.

The material facilitates next-generation advanced-node patterning by providing a protective, easily strippable material that overcomes challenges with nanosheet architectures. It provides gapfill of <10-nm trench and via structures, while also providing planarization for robust, faithful lithography and etch transfer. Its shelf life is 365 days at 21 °C.

Published: February 2023
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