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Granite-Based Wafer Stages

PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo MechanicsRequest Info
 
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AUBURN, Mass., June 11, 2024 — PI Granite-Based Wafer StagesPI’s granite-based multi-axis motion systems can be used for the automation of wafer metrology, glass substrate inspection, and lithography applications. Based on modular concepts, the stages are customizable with technologies including air bearings, rails-on-granite, direct drive motors, nanometer resolution encoders, and piezo drive systems. The granite-based systems can travel at ranges including a meter or more, depending on the configuration.



Published: June 2024
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Productsmaterials processingMaterialsautomationindustrialWafersmetrologyTest & MeasurementpiezosemiconductorsAmericasPI

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