HELIOS 1200 300-mm Sputter Tool

Buhler Inc., Business Area Leybold OpticsRequest Info
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HELIOS 1200 300-mm Sputter ToolThe HELIOS 1200 is the latest development of our renowned sputter tool for fully automated manufacture of demanding optical interference filters. The system addresses the market demand for coating tools for 300-mm wafer substrates for opto-semiconductor applications. High throughput and yield are achieved through high deposition rate, excellent uniformity, and in situ control of layer thickness by optical monitoring.

Published: January 2021
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