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HexaCube 6-D Motion Solution

attocube systems AGRequest Info
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Attocube systems AG’s hexaCube, an integrated 6-D motion solution, combines stiff design and long travel range with nanometer repeatability for positioning tasks in precision machining and optics, and for the semiconductor industry and research.

Measuring 190 × 170 × 105 mm, it provides travel ranges exceeding ±15 mm in X, Y and Z directions and rotations in excess of ±19°. It offers stiffnesses of 1 N/μm in X-Y and 3 N/μm in Z, enabling 6-D motion of samples weighing up to 700 g.

Two ECC100/PRO motion controllers enable simultaneous operation of the piezoelectric motors, supporting a smooth and fast movement of the sample platform. The system’s software is fully compatible with the 3-D mouse SpaceNavigator.

Photonics Spectra
Feb 2014

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