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High-Reflectance Coating

Teledyne Acton OpticsRequest Info
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ACTON, Mass., July 31, 2015 — Acton Optics & Coatings 193-nm XLActon Optics & Coatings, part of Princeton Instruments Inc., has announced the 193-nm XL high-reflectance coating for low-fluence, high-repetition-rate excimer laser applications.

The multilayer dielectric coating features a ≥96 percent (45° angle of incidence) to ≥97 percent reflectance (normal incidence) at 193 nm. It combines a hybrid structure with balanced stress, optimized for excimer laser repetition rates of 4 to 5 kHz.

The possibility of catastrophic damage due to microdefects and thermal stress fractures is reduced, while dehydration effects from high-repetition operation are prevented.

The coating can be applied to Acton standard mirror blanks, custom substrates and customer-supplied material. Applications include semiconductor R&D, testing, micromachining and materials processing.
Jul 2015

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