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IDS3010 - Displacement Measuring Interferometer

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Displacement Measuring InterferomterThe fiber-based IDS3010 measures displacements with a picometer resolution over distances of up to 5 m. The high level of modularity in combination with the miniaturized design of the controller and the sensor heads allow for easy integration in existing systems and devices. A broad portfolio of sensor heads includes options for extreme environments, such as ultra-high vacuum, low or elevated working temperatures, and radiation-harsh environments. Customized sensor heads are developed for customer specific requirements and applications. The IDS3010 performs most accurate measurements of linear motions in up to three axes and can be used on different materials and geometries, such as glass or mirrors, and flat surfaces or cylinders. It is the perfect choice for vibration measurements, runout measurements of rotations, or the ultra precise motion control of piezo positioners or linear stages.

The position signal can be used as input for a closed-loop positioning system. A broad spectrum of digital and analog real-time interfaces and protocols enables the simple transmission of position data. The high-speed interfaces for real-time data communication are AquadB, BiSS-C, proprietary serial word (HSSL), synthetic analog sin/cos, and linear analog output. All signals can be outputted as either single-ended (LVTTL) or differential (LVDS). IDS3010

Specifications: working distance: 0..5000 mm sensor resolution: 1 pm sensor repeatability: 2 nm max. target velocity: 2 m/s measurement bandwidth: 10 MHz signal stability (WD 77mm): 0.110nm (2σ)

attocube‘s service team will support you in installing and using the interferometer. Besides the conventional customer support, like repair or recalibration, attocube offers a wide range of additional services to support customers in performing displacement measurements in nanometer range such as loan kits, test measurements, installation service, interferometer training, calibration and certification.

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Test & MeasurementProductsdisplacement measurementvibration analysispiezo stagesmicroscopy stagesSensors & Detectorspiezo actuatorsvacuum compatiblelaser interferometerfiber-based

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