IPUP2 Vacuum Pump
Edwards VacuumRequest Info
Edwards Group Ltd. has introduced the IPUP2, an integrated point-of-use pump for load-lock and transfer chamber applications on Applied Materials’ manufacturing platforms and for use by semiconductor manufacturers.
The second-generation device reduces pump down times by ~50%, uses 70% less energy and requires no maintenance between overhauls. Its power curve and pumping speed (180 m3/h) have been optimized to increase tool throughput. Peak pumping speed is 89% faster than first-generation pumps and down times are up to 54% faster.
The pump includes horizontal and vertical inlets, and its size and configuration enable direct swaps with previous-generation pumps. It has demonstrated a mean time between failures (MTBF to Semi E10 standards) of more than five years with in excess of 3 million load-lock cycles.
http://www.edwardsvacuum.com
https://www.photonics.com/Buyers_Guide/Edwards_Vacuum/c1869
EuroPhotonics
Dec 2013