IPUP2 Vacuum Pump

Edwards VacuumRequest Info
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Edwards Group Ltd. has introduced the IPUP2, an integrated point-of-use pump for load-lock and transfer chamber applications on Applied Materials’ manufacturing platforms and for use by semiconductor manufacturers.

The second-generation device reduces pump down times by ~50%, uses 70% less energy and requires no maintenance between overhauls. Its power curve and pumping speed (180 m3/h) have been optimized to increase tool throughput. Peak pumping speed is 89% faster than first-generation pumps and down times are up to 54% faster.

The pump includes horizontal and vertical inlets, and its size and configuration enable direct swaps with previous-generation pumps. It has demonstrated a mean time between failures (MTBF to Semi E10 standards) of more than five years with in excess of 3 million load-lock cycles.

Published: July 2013
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