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DataRay Inc. - ISO 11146-Compliant Laser Beam Profilers

Imaging Spectrometers

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Imaging SpectrometersImaging spectrometers from McPherson Inc. measure vertical spatial profiles in addition to dispersed wavelengths.

The devices operate in the vacuum UV range to view plasma impurity emission lines from 300 to 3200 Å and feature a carefully adjusted horizontal aperture in the optical path. The 3-m model provides simultaneous wavelengths measured in a single discharge. With an entrance slit width of 0.02 mm, users can achieve 15.3 pm spectral resolution full width at half maximum. The vertical observation range can be tailored to different heights with a convex mirror, enabling edge profile measurement and full profile measurements that cover an entire vertical size of the plasma.

The new spectrometers can be built for high- or ultra-high vacuum. They can be equipped with microchannel plate intensifiers or sensitive CCD detectors.


Published: October 2017
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Productsimaging spectrometersMcPhersonTest & MeasurementImagingAmericas

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