In-Line Particle Sensor

CyberOptics Corp.Request Info
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MINNEAPOLIS, March 13, 2020 — In-Line Particle SensorThe In-Line Particle Sensor (IPS) from CyberOptics® Corp. features CyberSpectrum software to constantly detect particles in gas and vacuum lines in semiconductor process equipment.

The IPS quickly identifies, monitors, and enables troubleshooting of particles down to 0.1 µm. It can be installed in any gas or vacuum system, and is particularly relevant for extreme UV lithography tools where the ability to monitor particles in-line can significantly improve tool yield and productivity.

Published: March 2020
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ProductsIn-Line Particle SensorCyberOpticsSensors & DetectorsOpticssemiconductorsindustrialAmericas

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