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Industrial Femtosecond Laser

MKS Spectra-PhysicsRequest Info
 
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SANTA CLARA, Calif., Feb. 9, 2015 — Glass cut with the Spectra-Physics ClearShape processThe Spirit 1040-16 industrial femtosecond laser from Spectra-Physics delivers >16 W average output power with ultrashort <400 fs pulse width, 40 μJ pulse energy and repetition rate up to 1 MHz.

The laser is suited for fast, cold micromachining of semiconductors, flat-panel displays and other microelectronics manufacturing applications, including the company’s patent-pending ClearShape process for high-quality cutting of chemically strengthened glass, unstrengthened glass and sapphire at speeds of more than 1000 mm/s.

The process results in no chipping, Ra <0.1 μm edge roughness and as-cut bending strength of >650 MPa for chemically strengthened glass, according to Spectra-Physics.


Photonics.com
Feb 2015
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