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Industrial Robotic Microscope

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Industrial Robotic MicroscopeThe nSpec® Macro Standalone robotic microscope from Nanotronics provides high-resolution rapid results for industrial inspection in one single image.

The system provides automatic capture and analysis of images to detect and quantify defects and features of interest. Its small footprint provides operators with a desktop tool to immediately produce high-resolution images, successfully identifying and defining causality. It is designed for the inspection of bare or patterned wafers up to 200 mm. The system provides full sample illumination and the ability to individually modify the LEDs to adjust intensity, color, and location of illumination for complete flexibility. The minimum defect resolution ranges from 50 to 100 μm, contingent on field of view or wafer sizes.

Photonics Spectra
Feb 2022

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ProductsnSpec Macro Standaloneindustrial robotic microscopeNanotronicsindustrialMicroscopyimagingAmericas

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