Industrial Vertical Stage

Name: Industrial Vertical Stage
Brand: MKS Instruments Inc.

MKS Instruments Inc.Request Info

The Newport IDL280-Z20 vertical stage available from MKS Instruments Inc. is designed for industrial applications that require high load capacities.

Based on a modular wedge design, the IDL280-Z20 provides minimum incremental motion of 0.1 µm over 20 mm of travel with smooth motion for fine positioning. A precision ball screw drive with a 2-mm pitch is able to move loads up to 500 N with a speed of 5 mm/s.

With high stiffness of 10 µrad/Nm, the Newport vertical industrial stage is ideal for advanced XY systems with high dynamic performance. Like all IDL stages, the IDL280-Z20 is fully compatible to the Newport XPS controller but can also be combined with other third-party industrial motion controllers. Upon request, custom-designed IDL280-Z vertical stages are available in other travels or sizes to meet the specifications and requirements of individual applications.

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Industrial Vertical Stage