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IndyStar Excimer Laser

Coherent Inc.Request Info
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SANTA CLARA, Calif., May 27, 2008 – Coherent said its new IndyStar has the longest tube lifetime of any compact industrial excimer laser, and provides increased reliability and lower overall cost.

The IndyStar, which has been designed as the next-generation replacement for the ExciStar S-Industrial excimer laser, incorporates Coherent’s newest excimer tube design, the RoHS – Almeta, which delivers several billion pulses at 193 and 248 nm.

This technology enables the IndyStar to achieve such long component lifetimes because the organic meterials have been eliminated from the former metal-ceramic Future Tube design.


Coherent's new IndyStar industrial excimer laser

Furthermore, a change in the arrangement of the electrode capacitors lowers the charge density at the electrodes, without reducing the output power of the tube, giving the IndyStar tube-lifetimes and gas-lifetimes many times longer than its predecessor.

To make upgrading effortless, all critical dimensions, power connections, computer interfaces and main performance parameter of the IndyStar are identical to the ExciStar S Industrial.

Target applications for the IndyStar are in precision manufacturing and inspection, where its high repetition rate and stabilized, low-noise output are key requirements.  Application examples include photomask inspection and inkjet nozzle drilling, as well as in several micromachining applications. The IndyStar will be available for ArF (193 nm) and KrF (248 nm) operation.

For more information, visit:

Coherent Inc.
5100 Patrick Henry Dr.
Santa Clara, CA 95054
Phone: (408) 764-4000
Fax: (408) 764-4800
May 2008

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Coherentexcimer tubeExciStarindustrialindustrial excimer laserIndyStarphotonicsProductsRoHS - Almeta

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