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IndyStar Excimer Laser

Coherent Inc.Request Info
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SANTA CLARA, Calif., April 7, 2010 — Coherent Inc. has added a new model to its IndyStar family of compact excimer lasers that offers a 2-kHz repetition rate for increased throughput.

The fully Semi S2-certified laser incorporates several new output stabilization features for improved processing, making it suitable for use in semiconductor fabrication, testing, inspection and micromaterials processing facilities. It is offered with a choice of 193-nm (ArF) output where it delivers 8 W of stabilized power, or 248-nm (KrF) output with 12 W of stabilized power.

The device uses an advanced electronics platform enabling two new stabilization features called PowerLok and TimeLok. The former ensures constant pulse energy of each laser pulse, actively stabilized particularly for applications using bursts of pulses or specific pulse trains. The latter provides good trigger-to-pulse delay stability, supporting tight synchronization with other equipment.

The laser offers low cost of ownership because of its use of field-proven all-metal-ceramic tube technology that delivers high reliability and long lifetime. With 193-nm operation, the laser shows a tube/optics lifetime exceeding 10 billion pulses, which translates into hands-free operation for more than one year.

Suitable for use in semiconductor applications such as photomask inspection and testing photolithography optics, it also enables other high-speed processes including precision material ablation tasks and high-value marking applications.

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Apr 2010

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all-metal-ceramic tubeAmericasArFCoherentexcimer laserhands-freeindustrialIndyStarKrFmarkingmaterial ablationmicromaterials processingphotomask inspectionPowerLokProductsSemi S2-certifiedsemiconductor fabricationtesting photolithography opticsTimeLoklasers

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