Close

Search

Search Menu
Photonics Media Photonics Buyers' Guide Photonics Spectra BioPhotonics EuroPhotonics Vision Spectra Photonics Showcase Photonics ProdSpec Photonics Handbook
More News

Inspection and Metrology Systems

Rudolph TechnologiesRequest Info
 
Facebook Twitter LinkedIn Email Comments
WILMINGTON, Mass., Sept. 16, 2016 — Rudolph Technologies Inc. has announced the Firefly and Dragonfly inspection and metrology systems for advanced semiconductor manufacturing. Both systems leverage newly designed optical and imaging systems optimized for defect type, size and maximum throughput.

The Firefly system is designed for high-resolution inspection in front- and back-end applications. It is designed to detect defects smaller than one micron in multiple applications including fan-out wafer level packaging, CMOS image sensors, microelectromechanical systems and radio frequency sensors.

The Dragonfly system is designed for high-speed 2D inspection in advanced packaging processes.It targets large die, multichip advanced packaging applications, with 2D inspection sensitivity down to 2 μm, a modular approach to integrated metrology and defect analysis software. The system quickly detects, images and analyzes defects on a broad range of devices and packages. The Dragonfly system will deliver critical in-process inspection and metrology for wafer reconstitution, after develop, after etch and at each level of redistribution.


Photonics.com
Sep 2016
REQUEST INFO ABOUT THIS PRODUCT

* Message:
(requirements, questions for supplier)
Your contact information
* First Name:
* Last Name:
* Email Address:
* Company:
Address:
Address 2:
City:
State/Province:
Postal Code:
* Country:
Phone #:
Fax #:

Register or login to auto-populate this form:
Login Register
* Required

When you click "Send Request", we will record and send your personal contact information to Rudolph Technologies by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our Privacy Policy and Terms and Conditions of Use.
MORE FROM PHOTONICS MEDIA
Test & Measurement
metrologyProductsCMOSRudolph TechnologiesfireflydragonflyInspection and Metrology SystemsAmericasTest & Measurementimagingsensing

back to top
Facebook Twitter Instagram LinkedIn YouTube RSS
©2019 Photonics Media, 100 West St., Pittsfield, MA, 01201 USA, info@photonics.com

Photonics Media, Laurin Publishing
x We deliver – right to your inbox. Subscribe FREE to our newsletters.
X
Are you interested in this product?
When you click "Send Request", we will send the contact details you supply to Rudolph Technologies so they may respond to your inquiry directly.

Email Address:
Name:
Company:
Stop showing me this for the remainder of my visit
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.