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Integrated Vertical and Rotation Stage

MKS/NewportRequest Info
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Newport Corp. has launched an integrated vertical and rotation stage, the ZVR, for semiconductor wafer positioning, metrology, inspection and repair. It also is useful in LED production, 3-D scanning, digitizing models and validation applications.

It features a rigid design with improved cantilevered load capacity, lower crosstalk and higher dynamic system performance than offered by earlier designs. With a low-profile footprint, low mass and a high natural frequency, the stage accommodates a variety of rapid step-and-settle positioning applications.

The ZVR vertical platform has a wide, three-point base with a stepper-motor-driven 10-mm Z-stage. The integrated rotation stage uses stainless steel ball bearings for smooth operation.

It is available in two models: the ZVR-PP with a stepper motor and the ZVR-PC with a servo-driven DC motor. Both provide continuous 360° rotation for angular travel. An optional linear encoder is available for the Z-stage, which also is available without the rotation stage. The stable three-point bottom interface permits mounting to any X-Y stage or other platform. A large clear aperture through the center of the stage simplifies electrical cable and vacuum-chuck cable/hose management. All electrical and vacuum chuck utility connections are found at a single location.

Photonics Spectra
Sep 2012

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AmericasCaliforniametrologyNew ProductsNewportProductsstage 3-D scanningstage digitizing modelsstage inspectionstage LED productionstage metrologystage repairstage semiconductor wafer positioningstage servo-driven DC motorstage step-and-settle positioningstage stepper motorstage validationTest & Measurementvertical and rotation stageZVR-PCZVR-PP

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