Intlvac PARMS for Sputtered IR Films

Intlvac Thin Film Corp.Request Info
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The Nanochrome IV PARMS produces dielectric thin film layers by reactive magnetron sputtering with final reaction and film densification at the substrate surface using a high current, low energy ion source. Reactive operation results in faster deposition times. Low pressure sputtering achieves higher deposition rates. Films are made reactively to produce highly dense, pure oxides and nitrides suitable for the UV, VIS NIR, SWIR and MWIR ranges.

Published: April 2024
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