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Alluxa - Optical Coatings LB 8/23

IonBeam Processing of PIC Waveguides

scia Systems GmbHRequest Info
 
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IonBeam Processing of PIC Waveguidesscia Systems’ ultra-precise ion beam processing is driving manufacturers’ success in producing PIC devices. Ion beam etching is ideally suited for the precise and uniform production of 3D waveguides while maintaining the integrity of the underlying material. Adjusting the ion incidence angle allows the creation of smooth vertical sidewalls. Material modifications by ion beam trimming improve thickness deviations, uniformity, and surface quality.


Published: September 2025




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