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Ion Beam Etch System

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ST. PETERSBURG, Fla., Sept. 25, 2019 — Ion Beam Etch SystemThe Quasar Ion Beam Etch System from Plasma-Therm LLC is designed for advanced ion beam etch (IBE) with enhanced capability.

The Quasar IBE system incorporates a unique feature of planetary scanning technology with the ability to sweep the wafer in an oscillatory manner across the ion beam. It provides long-term etch uniformity, etch rate stability, and process, fulfilling the requirements of next-generation of IBE technology.



Published: September 2019
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