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JetStep Panel Lithography System

Photonics Spectra
Dec 2013
Rudolph Technologies Inc.Request Info
 
Rudolph Technologies Inc.’s JetStep panel lithography system can process both glass and organic laminate panels for applications in semiconductor advanced packaging.

The system combines LCD manufacturing with on-the-fly autofocus for thick photoresists, an onboard reticle library and a 6-s reticle change-out wheel. It is compatible with the company’s suite of software products, including ProcessWORKS for run-to-run control, Discover for yield management, and ARTIST for fault detection and classification.


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AmericasARTIST softwareDiscover softwareindustrialJetStep panel lithography systemNew JerseyNew ProductsopticsProcessWORKS softwareProductsRudolph Technologiessemiconductor packaginglasers

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