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Alpine-Research-Optics_ARO.jpgFlat mirrors for general-purpose beam steering in ultraviolet excimer laser-based applications such as microlithography, micromachining, materials processing and lasik have been announced by Alpine Research Optics (ARO) Corp. The company says that the thin-film optics produce high reflectivity, long lifetimes, good laser damage resistance and mechanical durability. The mirrors are supplied on 25- and 50-mm-diameter fused silica substrates and are available at 193-, 248-, 308- and 351-nm wavelengths and in designs optimized for either a 0° or a 45° angle of incidence. They offer λ/10 surface flatness over an 80% clear aperture and 10-5 surface quality.

Photonics Spectra
Jul 2006

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Alpine Research Optics (ARO) Corp.industrialmicrolithographymicromachiningNew Productsultraviolet excimer laser-based applications

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