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LINEAR STAGES

MKS/NewportRequest Info
 
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SDS series linear translation stages The SDS series linear translation stages from Newport Corp. have low profiles for OEM integration into semiconductor equipment. The stainless steel devices have profiled bearing ways that provide extended contact with the ball bearings for maximum stiffness, load capability up to 39 lb and 25-mm travel. They have a side-mounted micrometer that minimizes the overall stage envelope and that does not increase stage height. The stages are suitable for applications that require manual adjustment with pitch and yaw of <200 and <100 µrad, respectively.

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Photonics Spectra
Mar 2003
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linear translation stagesNew ProductsNewportOEM integrationpositioningsemiconductor equipmentstainless steel devices

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