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Large-Diameter Turning Mirror Mount

IPG Photonics, Microsystems Div.
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For UV Laser Processing
HOLLIS, N.H., July 19 -- JP Sercel Associates (JPSA), a maker of laser micro-machining systems and laser beam delivery systems, has introduced a new large-format turning mirror mount for ultraviolet (UV) laser processing. The new mount is an industrial-grade vacuum UV product designed to turn a UV excimer laser beam at a 90-degree angle and direct it through a beam delivery system. Because it is a vacuum product, it can be used with short-wavelength UV excimer beams including 157 nm, 193 nm and 248 nm. The turning mirror is gimbal-mounted, such that the turning mirror pivots exactly at its front surface, which provides zero crosstalk between the X and Y adjustment axis. There is no grease or oil used in the design, and all organic materials have been removed to prevent degradation by UV radiation and consequent contamination of the optics and interior chamber, leading to longer optics life. JPSA’s turning mirror mount can be purged with high-purity gases such as nitrogen.

The turning mirror is front surface located in a spring-loaded premount to give low stress and stability to the mirror, as well as easy serviceability and fast access. The module features a 50 x 50 mm clear aperture and rectangular format mirror, which allows passage of a larger-diameter homogenized beam without beam corner clipping.

JPSA’s new large-diameter turning mirror mount is equipped with high-sensitivity differential micrometers, separated by a high-purity nickel bellows so that there is no possibility of micrometer grease contaminating the module’s optics, a sealed configuration. The mirror mount is designed to hold submicron tolerances in a 24/7 industrial production environment.

For more information, visit:; e-mail:

JP Sercel Assoc.
17D Clinton Dr.
Hollis, NH 03049
Phone: (603) 595-7048
Fax: (603)598-3835
Jul 2005
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