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Laser Dicing and Grooving Platform

ASMPT NEXX Inc.Request Info
 
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Laser Dicing & Grooving Platform. Courtesy of ASMPT Semiconductor Solutions.ALSI LASER1206 from ASMPT Semiconductor Solutions is a system for bare wafer handling and separation under Class 1000 cleanroom conditions. LASER1206 features patented multibeam laser processing technology, with fully automated film frame and bare wafer handling. The patented UV laser technology achieves maximum precision with minimal heat impact, which reduces burr formation and die strength degradation. The device has an integrated wafer coating and cleaning station and offers numerous options for fully automated handling of film frames and bare wafers. The positioning accuracy of the planar motion system is <1.5 μm. For grooving, wafers from 60 to 800 μm can be processed, while for dicing, the wafer thickness ranges from 20 to 200 μm.


Published: September 2025




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ProductsASMPT Semiconductor SolutionsAmericasLasersWaferscleanroomASMPT

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