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Linear Motor Stages

MKS/NewportRequest Info
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The XM series of linear stages from Newport Corp. is now available with a minimum incremental motion of 1 nm for nanopositioning applications, including laser machining, semiconductor wafer processing, sensor test and calibration, and ultraprecision assembly.

The stages’ improved performance is the result of an optimized driver design with the XPS-DRV02L drive module to deliver dynamic performance with consistent, reliable motion. With a frictionless direct-drive device, the stages offer motion performance that is not limited by backlash, hysteresis, wind-up or stiction. In addition, its center-driven ironless motor coil ensures zero cogging for smooth velocity control and high efficiency with minimized heat generation. Ultraquiet, anti-creep crossed roller bearings enable smooth, ripple-free motion and accurate trajectory control.

A high-precision glass scale encoder provides accurate position feedback with 80-nm bidirectional repeatability. The precision alignment and mounting of the low-thermal-expansion scale in the stage’s center minimizes the impact of temperature changes on stage repeatability and accuracy.

The stages are machined from stress-relieved 7075 aluminum for long-term strength and stability. All critical stage surfaces undergo multiple machining processes and precision grinding under strict temperature and quality control to guarantee overall performance and accuracy.

Photonics Spectra
Jul 2013
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