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Nanopositioning Stages

Aerotech Inc.Request Info
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Ensuring a long lifespan, the QNP-L series of linear piezo nanopositioning stages from Aerotech offers intense resonant frequency for high-process-throughput and fast closed-loop response.

Highly precise, frictionless flexure guidance achieves high stiffness while featuring finite element analysis. The devices offer closed-loop feedback using a capacitive sensor design that yields subnanometer positioning resolution and high-positioning accuracy. The capacitive sensors directly measure the output of the positioning carriage, enabling linearity to 0.0007 percent and superior positioning repeatability when compared to indirect feedback metrology techniques.

A variety of travel and feedback options make the stages ideal for applications ranging from microscopy to optics alignment.

Oct 2014

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