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Linear Stage

Photonics Spectra
May 2013
PI (Physik Instrumente) LP, Air Bearings and Piezo Precision MotionRequest Info
 
The miCos MCS XY precision linear stage from PI (Physik Instrumente) LP offers resolution up to 5 nm and 0.2 µm repeatability for optical inspection of precision machined parts, material research, microscopy applications and topographical measurements in semiconductor and flat panel design.

The two-axis positioning system, driven by the SMC Hydra motion controller, can handle loads up to 45 lb and can achieve velocity ranges from 1 µm/s to 200 mm/s. The stage provides 102 mm of positioning range in both axes and achieves ±2-µm straightness/flatness of motion. It delivers angular precision with ±20 µrad yaw and ±40 µrad pitch.

Several motor and position feedback options are offered. For applications where closed-loop operation is not required, lower-cost open-loop stepper motors are offered. Available for higher-performance demands are stepper, DC servo and direct-drive electromagnetic noncontact linear motors.

The device can be combined with linear vertical and rotational stages and goniometric cradles.


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