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Lion 300 RF Ion Source

Buhler Inc., Business Area Leybold OpticsRequest Info
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CARY, N.C., Nov. 15, 2010 — Leybold Optics USA Inc. has launched a high-power radio-frequency (RF) ion source specifically designed for its large SYRUSpro box coaters. The Lion 300 produces good film quality with very low losses and low consumable costs, resulting in a lower cost per piece in production.

It uses a specially designed single grid. The design allows quasi neutral bombardment of the growing films and does not require an additional neutralizer. The source is designed for easy maintenance and allows operation with various gases like oxygen, argon, nitrogen and a mixture of the three. It is fully integrated into the control software and allows operation in automatic mode.

Key features include precise beam uniformity over the complete dome and dense, shift-free coatings. The grid design enables an easy and fast exchange and makes it very user-friendly. The Lion 300 is suitable for ion-assist deposition as well as for pre-cleaning and edging.
Nov 2010

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Americasargonautomatic modebeam uniformitybox coaterscoatingsedgingion sourceion-assist depositionLeybold OpticsLION 300nitrogenopticsoxygenpre-cleaningProductsquasi neutral bombardmentradio frequencyRFshift-free coatingssingle gridSYRUSpro

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