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Low-Pressure Chemical Vapor Deposition (LPCVD)

Deposition Sciences Inc. (DSI)Request Info
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Low-Pressure Chemical Vapor Deposition (LPCVD)DSI created a form of low-pressure chemical vapor deposition (LPCVD) called IsoDyn specifically to address the production of thin films on highly curved optics. These can be difficult or impossible to manufacture using other methods.

In the IsoDyn process, the coating material is created through the chemical reaction of a precursor gas within the coating chamber, rather than from a source consisting of the material itself. Specifically, parts to be coated are put into an evacuated chamber and heated to about 500°C. The chamber is then filled with a chemical vapor at relatively high (usually 0.1 Torr to 5.0 Torr) pressure. The heat causes a chemical reaction in the precursor gas, resulting in deposition of the desired substance on all exposed surfaces of the substrate. This process is repeated with various precursors to produce a multilayer coating.

Because of the gas pressure, the mean free path for molecules is very short, meaning that deposition occurs at the same rate on every surface within the chamber, regardless of its position or orientation. This makes IsoDyn technology particularly useful for producing highly uniform coatings on parts with unusual shapes or steep curvatures.

Since the deposition rate is uniform throughout the chamber, there is no need to physically move the parts during coating, unlike other coating methods, greatly simplifying the type of tooling needed to hold the parts. In fact, DSI employs proprietary technology that yields “tool marks,” that is, areas which are not coated, that are virtually negligible (as small as 0.5 µm).

The high temperature used in the IsoDyn process also gives rise to extraordinarily durable coatings. The overall result is coatings that can survive repeated handling and abrasion, and that perform well over very large temperature and humidity ranges. It also results in excellent laser damage threshold characteristics.

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coatingsDeposition SciencesProductsanti-reflective coatingschemical vapor depositionIsoDynLPCVDball Lensdomerod lens

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